| model numberSPV-100 | External dimensions1000*900*1750mm (L*W*H) |
| weight 500KG | Device Appearance Colorsilver grey |
| RF Power Supply | |
| power:0~600W | frequency:13.56MHz |
| IF power supply | |
| power0~1000W | frequency40KHz |
| Cavity Internal Dimensions450*450*500mm(W*H*D) |
| thickness25mm |
| materialAluminum alloy (customized stainless steel cavity) |
| tightnessMilitary grade welded seal |
| Electrode plate effective size322*351mm(W*D) |
| Available space spacing20mm |
| working space6 floors |
| work trayOne set is standard, and the material is optional (aluminum, steel mesh) |
| Electrode plate layoutHorizontal arrangement, movable extraction |
| Double stage rotary vane pump (oil pump)60m3/h |
| vacuum lineAll stainless steel pipes, and high-strength vacuum bellows |
| Flow range0~300SCCM | Process gas pathStandard air circuit, can be customized |
| system controlPLC | interactive mode7 inch touch screen |
