| model numberSPV-150 | External dimensions1100*940*1755mm (L*W*H) |
| weight 600KG | Device Appearance Colorsilver grey |
| RF Power Supply | |
| power:0~600W | frequency:13.56MHz |
| IF power supply | |
| power0~2000W | frequency40KHz |
| Cavity Internal Dimensions500*500*600mm(W*H*D) |
| thickness25mm |
| materialAluminum alloy (customized stainless steel cavity) |
| tightnessMilitary grade welded seal |
| Electrode plate effective size372*451mm(W*D) |
| Available space spacing24mm |
| working space8 floors |
| work trayOne set is standard, and the material is optional (aluminum, steel mesh) |
| Electrode plate layoutHorizontal arrangement, movable extraction |
| pump setDouble stage rotary vane pump (oil pump) or Roots pump + single stage rotary vane pump |
| vacuum lineAll stainless steel pipes, and high-strength vacuum bellows |
| Flow range0~300SCCM | Process gas pathStandard two-way, can be customized (argon, oxygen, nitrogen, hydrogen, carbon tetrafluoride) |
| system controlPLC | interactive mode7 inch touch screen |
