The process gas is ionized into plasma by applying an electric field. The "active" components of plasma include ions, electrons, atoms, free active groups, excited-state nuclides (metastable states), photons, etc. Plasma treatment utilizes the properties of these active components to alter the surface properties of samples through physical and chemical reactions such as oxidation, reduction, pyrolysis, cross-linking, and polymerization, thereby optimizing material surface properties and achieving purposes such as cleaning, modification, and etching.
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